0.000e+00  0  0  0  0
1.000e-07  0  0  0  1
2.000e-07  0  0  1  0
3.000e-07  0  0  1  1
4.000e-07  0  1  0  0
5.000e-07  0  1  0  1
6.000e-07  0  1  1  0
7.000e-07  0  1  1  1
8.000e-07  1  0  0  0
9.000e-07  1  0  0  1
1.000e-06  1  0  1  0
1.100e-06  1  0  1  1
1.200e-06  1  1  0  0
1.300e-06  1  1  0  1
1.400e-06  1  1  1  0
1.500e-06  1  1  1  1